Pattern AOI
LTPS/LCD
(TFT/Color
Filter)/OLED
主要特征
- Using vision system to detect and classify the investigate defect. (Open / Short / Particle, etc.)
- Provide special algorithm for TFT/ CF / LTPS process (Long pitch, A-π, Panel to Panel, Defect Filtering etc.)
- Optimized resolution according as Customer & Object
产品规格
| Inspection | Detection Range | 0.8 ~ 5um (TFT/ LTPS) · 4um, 7.5um, 10um (Color Filter) |
|---|---|---|
| Size | ~ 10G Glass(2,880 X 3,130) | |
| Light Source | LED, Metal Halide | |
| Review | Inspection Time | ≤ 1.2sec./ Point |
| Type | Stand Alone & Inline | |
