Aligner & Hot Press
主要特征
- In-Line Cluster type
- High alignment accuracy
- Highly uniform process for pressure & temperature
产品规格
- Glass size : 2,200 X 2,500 mm
- Align accuracy : ≤±100㎛ (after Pressing)
- Heater Temperature : Mas 100℃ ±5℃
- Pressing pressure : Max 84ton
- Tact time
- - Aligner <90sec
- - Hot Press <135sec
(Depends on customer)
- Chamber Vacuum : 10mTorr (Operation)