MACRO
Inspection
주요특징
- By changing the angle of light incidence, operator can inspect
the macro defect or MURA defect - Using robot arm with glass chuck.
- Easy operation by manual joystick. (Glass & Light)
제품사양
Inspection Size | ~ 10G Glass(2,880 X 3,130) | |
---|---|---|
Optic | Reflection Light | Metal Halide, LED |
Transmission Light | 3-Wavelength Fluorescent | |
Stage | Mechanism | Dual Link Robot |
Deg. Of Freedom | X, θX, θZ, J1, J2 | |
Options | Steam, Review, Laser Indicator |