Evaporation
Particle AOI
주요특징
- Using vision system to detect and classify the investigate defect in
N2 Glove box after deposition process . - Optimized design at a minimum by particle (N2 Glove Box)
제품사양
Inspection | Detection Range | ≥ 1um (For Customer) |
---|---|---|
Size | ~ Half 6G Glass(1,500 X 925) | |
Light Source | LED, Metal Halide | |
Review | Inspection Time | ≤ 1.5sec./ Point (in N2 Glove Box) |
Type | Stand Alone |