Vacuum Alignment
System
Key Features
- Reduce Tact-time by fast vacuum pumping
- Advanced sticky chuck for upper glass hold
- Reliability and technical support
Specification
- Glass size : 2,200 X 2,500 mm
- Align accuracy : <±1㎛
- Max vacuum pressure : 0.13Pa
- Vision resolution : 0.625㎛
- Tact time : ~ 100sec
