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Plasma Technologies

Application of Plasma technologies

  • Display manufacturing
    TFTㆍLCD manufacturing
    Organic EL manufacturing
  • Advanced environmental technology
    Advanced water treatment
    Pollution reduction
  • Machinery and parts
    MEMS manufacturing
    Ion implantation
  • NT technology
    Nano powder manufacturing
    Carbon nano tube
  • BIO industry
    Bio chip manufacturing
    Analysis equipment for protein structure
  • Accelerator
    Compact accelerator
  • Optical science
    EUV generation
    Laser technology
  • Aerospace industry
    Thruster for a satellite
    Plasma propulsion for astronautics
  • Energy industry
    Nuclear fusion energy
    Hydrogen energy
  • Semiconductor manufacturing
    Semiconductor processes
    Device packing cleaning

Meaning of Plasma

  • The fourth state of matter, in which atoms (or molecules) in the state of a cation and free unbound electrons exist, when energy is applied to a gaseous atom or molecule and then a peripheral electron is lost
  • A sufficient amount of cations and electrons, which can be processed statistically, exist
  • Neutral property in terms of electricity

Matter in Plasma

  • Molecule (M) > Atom (a) > Radical (R) > Ion (i) > Electron (e)
    1. ① M : The smallest particle that keeps a property of a substance (CF4,O2,….)
    2. ② a : Independent element (C,F,H,….)
    3. ③ R : Gas molecule without part of peripheral electrons (Elements for chemical reaction, e.g. CF3+, CF2+,….)
    4. ④ i : +electric charge
    5. ⑤ e : - electric charge. Its mass is 1/1890 of that of an ion and has strong activity. (Source for recombination or dissociation of a molecule or atom)

Plasma
Characteristics

  • Electrical

    • Conductive
    • Electricity can pass through because of unbound electrons and ions if an electric field exists
    • Electrical conductivity increases depending on rising temperatures. 3T/2
    • E.g. : Same as that of copper at nearly 10 million ℃ or above

  • Magnetic

    • Motion perpendicular to an electric field if it is applied
    • Lower electric resistance if plasma density increases

  • Chemical

    • Ions and unbound electrons in plasma can cause excitation and Ionization of molecules or atoms due to thermal motion
    • Excitation and Ionization of molecules facilitates reaction with other molecules or atoms
    • It causes a chemical reaction on the surface of a solid in contact with plasma

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