Evaporation
Particle AOI
Key Features
- Using vision system to detect and classify the investigate defect in
N2 Glove box after deposition process . - Optimized design at a minimum by particle (N2 Glove Box)
Specification
| Inspection | Detection Range | ≥ 1um (For Customer) |
|---|---|---|
| Size | ~ Half 6G Glass(1,500 X 925) | |
| Light Source | LED, Metal Halide | |
| Review | Inspection Time | ≤ 1.5sec./ Point (in N2 Glove Box) |
| Type | Stand Alone | |
