Evaporation Particle AOI

Evaporation
Particle AOI

Key Features

• Using vision system to detect and classify the investigate defect in
  N2 Glove box after deposition process .
• Optimized design at a minimum by particle (N2 Glove Box)

Product Specifications

Inspection	Detection Range	≥ 1um (For Customer)
	Size	~ Half 6G Glass(1,500 X 925)
	Light Source	LED, Metal Halide
Review	Inspection Time	≤ 1.5sec./ Point (in N2 Glove Box)
Type		Stand Alone