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Display

Vacuum Chamber

The core hub of display process logistics, maintaining a clean vacuum environment

By continuously maintaining an ultrahigh vacuum of approximately 5.0 × 10⁻⁵ Pa, the system prevents organic contamination during transfer, while a low-friction transfer drive minimizes fine particle generation. A modular interface connects adjacent vacuum chambers for seamless process integration.

Vacuum Chamber CAD image

Vacuum Chamber

  • Customized vacuum chamber design from R&D to G10.5 large-area applications
  • Vacuum: medium to high and ultrahigh vacuum ranges
  • Materials: aluminum / stainless steel (SUS)

Customized Solutions

INVENIA offers flexible process and design support tailored to each customer’s product characteristics and applications.
Drawing on expertise validated through customer technical evaluations, we support the core performance required in mass-production environments, providing tailored consulting to improve process efficiency and reliability.

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