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MACRO Inspection

MACRO
Inspection

Key Features

  • By changing the angle of light incidence, operator can inspect
    the macro defect or MURA defect
  • Using robot arm with glass chuck.
  • Easy operation by manual joystick. (Glass & Light)

Product Specifications

Inspection Size ~ 10G Glass(2,880 X 3,130)
Optic Reflection Light Metal Halide, LED
Transmission Light 3-Wavelength Fluorescent
Stage Mechanism Dual Link Robot
Deg. Of Freedom X, θX, θZ, J1, J2
Options Steam, Review, Laser Indicator

Customized Solutions

INVENIA offers flexible process and design support tailored to each customer’s product characteristics and applications.
providing tailored consulting to improve process efficiency and reliability.

Inquiries