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Plasma Application Technologies
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- Display manufacturing equipment
- TFT/LCD manufacturing technology
- Organic EL manufacturing technology
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- Advanced environmental technology
- Advanced water purification technology
- Pollution reduction technology
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- Mechanical component technology
- MEMS manufacturing technology
- Ion implantation technology
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- Nanotechnology
- Nanopowder manufacturing technology
- Carbon nanotube manufacturing technology
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- Biotechnology industry
- Biochip manufacturing technology
- Protein structure analysis equipment technology
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- Accelerators
- Compact accelerator technology
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- Optical technology
- EUV generation technology
- Laser technology
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- Aerospace industry
- Satellite thrusters
- Plasma propulsion for space travel
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- Energy technology
- Nuclear fusion energy technology
- Hydrogen energy technology
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- Semiconductor manufacturing equipment
- Semiconductor process technology
- Device packaging cleaning technology
PlasmaDefinition
- Plasma is the fourth state of matter: energy added to gaseous atoms or molecules frees outer electrons, allowing positive ions and free electrons to exist independently.
- Contains enough positive ions and electrons for statistical treatment
- Electrically neutral overall
PlasmaWithin
Constituents
- Molecule (M) > Atom (a) > Radical (R) > Ion (i) > Electron (e)
- ① M: Smallest particles that retain the properties of a substance (CF4, O2, etc.)
- ② a: Individual elements (C, F, H, etc.)
- ③ R: Gas molecules that have lost some outermost electrons (participants in chemical reactions, such as CF3+, CF2+, etc.)
- ④ i: Positive charge
- ⑤ e: Negative charge. With a mass 1/1890 that of an ion, electrons are highly mobile (a source of recombination or molecular/atomic dissociation).
PlasmaProperties
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Electrical properties
- Conductivity
- Unbound electrons and ions allow current to flow when an external electric field is applied.
- Electrical conductivity increases with temperature: 3T/2
- Example: At approximately 10 million degrees or above, conductivity is comparable to copper.
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Magnetic properties
- When a magnetic field is applied, particles move perpendicular to the field direction.
- Electrical resistance decreases as plasma density increases.
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Chemical properties
- Thermal motion of ions and free electrons in plasma excites and ionizes molecules or atoms.
- Excited or ionized molecules react readily with other molecules or atoms.
- Chemical reactions occur on solid surfaces in contact with plasma.
Customized Solutions
INVENIA offers flexible process and design support tailored to each customer’s product characteristics and applications.
providing tailored consulting to improve process efficiency and reliability.
